Electronically scannable multiplexing device

ABSTRACT

An electronically scannable multiplexing device is capable of addressing multiple bits within a volatile or non-volatile memory cell. The multiplexing device generates an electronically scannable conducting channel with two oppositely formed depletion regions. The depletion width of each depletion region is controlled by a voltage applied to a respective control gate at each end of the multiplexing device. The present multi-bit addressing technique allows, for example, 10 to 100 bits of data to be accessed or addressed at a single node. The present invention can also be used to build a programmable nanoscale logic array or for randomly accessing a nanoscale sensor array.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a divisional application which is based upon and claims priorityfrom prior U.S. patent Ser. No. 11/117,276, filed on Apr. 27, 2005, nowU.S. Pat. No. 7,352,029, the entire disclosure of which is hereinincorporated by reference in its entirety.

FIELD OF THE INVENTION

The present invention generally relates to the field of semiconductordevices. More specifically, the present invention relates to asemiconductor multiplexing device that generates an electronicallyscannable conducting channel with two oppositely formed depletionregions. The multiplexing device has numerous applications. For example,the multiplexing device could be used to address multiple bits within amemory cell, or to connect nano lines to micro lines within a minimalspace or could be used to build a nanoscale programmable logic array orto perform chemical and/or biological sensing at the nanoscale(molecular) level.

BACKGROUND OF THE INVENTION

Conventional memory devices are limited to mostly 1 bit at theintersection of a wordline (WL) and a bitline (BL) in a memory array.For example, DRAM devices are limited to 1 bit per intersection, whichcorresponds to the presence of only one capacitor at each node.Similarly, FLASH devices have at most 2 bits per cell, in a multibit ormultilevel configuration. These 2 bits can be detected based on themagnitude and direction of the current flow across the cell.

However, conventional memory devices are not capable of easilyaccommodating more than two memory bits at every crosspointintersection. It would therefore be desirable to expand the accesscapability in memory devices to select or read multiple bits at everymemory area or crosspoint that is normally desired by one memorywordline and bitline.

One problem facing conventional semiconductor lithographic techniques isthe ability to electrically interconnect nano-scaled lines or patterns(on the order of 1 nm to 100 nm) and micro-scaled lines or patterns (onthe order of 90 nm or a feature that could be typically defined bysemiconductor processes such as lithography). Such connection is notcurrently practical, as it requires a significant interconnectsemiconductor area, which increases the cost and complexity of themanufacturing process or the final product.

It would therefore be desirable to have a multiplexing device or anaddressing device that establishes selective contact to memory cells,logic devices, sensors, or between nano-scaled lines and micro-scaledlines within a minimal space, thus limiting the overall cost andcomplexity of the final product.

The need for such a multiplexing device has heretofore remainedunsatisfied.

SUMMARY OF THE INVENTION

The present invention satisfies this need, and presents a multiplexingdevice capable of selectively addressing multiple nodes or cross-points,such as multiple bits within a volatile or non-volatile memory cell.This multi-node addressing aspect of the present invention uses the factthat wordline and bitline voltages can be varied in a continuousfashion, to enable the selection or reading of multiple states at everycrosspoint.

The present multi-node addressing technique allows, for example, 10 to100 bits of data to be recorded at a single node, or in general toaccess bits of data that are of the order of 100 times more denselypacked than conventional lithographically defined lines. As used herein,a node includes for example the intersection of a wordline and abitline, such as a memory wordline and bitline.

The multiplexing devices selectively generates a thin, elongated,semiconducting (or conducting) channel (or window) at a desired locationwithin a substrate, to enable control of the width of the channel, froma first conducting sea of electrons on one side of the substrate to asecond conducting sea of electrons on the other side of the substrate.

In one embodiment, the multiplexing device generates an electronicallyscannable conducting channel with two oppositely formed depletionregions. The depletion width of each depletion region is controlled by avoltage (or potential) applied to a respective control gate at each endof the multiplexing device.

In another embodiment, the depletion width is controlled from onecontrol gate only, allowing the access to the memory bits for both thereading and writing operations to be sequential. Other embodiments arealso contemplated by the present invention.

If the depletion width is controlled at both ends of the multiplexingdevice, along the same axis, the conducting channel can be small (e.g.,sub 10 nm) to enable random access to the memory bits. This embodimentis applicable to random access memories, such as SRAM, DRAM, and FLASH,for embedded and standalone applications and to programmable logicarrays.

BRIEF DESCRIPTION OF THE DRAWINGS

The various features of the present invention and the manner ofattaining them will be described in greater detail with reference to thefollowing description, claims, and drawings, wherein reference numeralsare reused, where appropriate, to indicate a correspondence between thereferenced items, and wherein:

FIG. 1 is a schematic illustration of an exemplary multiplexing deviceof the present invention, comprising a scannable conducting channelhaving a relatively narrow width, shown in a first position within ascanning region;

FIG. 2 is a schematic illustration of the multiplexing device of FIG. 1,showing the scannable conducting channel with a relatively wider width,in a second position within the scanning region;

FIG. 3 is a schematic illustration of another embodiment of themultiplexing device of FIGS. 1 and 2, wherein the scannable conductingchannel connects conducting lines, such as nano-scaled lines, on oneside of the multiplexing device to electrodes on the opposite side ofthe multiplexing device;

FIG. 4 is a schematic illustration of yet another embodiment of themultiplexing device of FIG. 3, wherein the scannable conducting channelconnects conducting lines, such as nano-scaled lines, on one side of themultiplexing device to other conducting lines, such as nano-scaledlines, on the opposite side of the multiplexing device;

FIG. 5 is a schematic illustration of still another embodiment of themultiplexing device of FIG. 4, wherein the scannable conducting channelconnects conducting lines, such as nano-scaled lines, on one side of themultiplexing device to other conducting lines, such as micro-scaledlines, on the opposite side of the multiplexing device;

FIG. 6 is a schematic illustration of another embodiment of themultiplexing device of the previous figures, wherein the scannableconducting channel is curvilinearly (non-linearly) controlled, toconnect non-coaxially (or coplanarly) disposed lines on both sides ofthe multiplexing device;

FIG. 6A is a schematic illustration of another embodiment of themultiplexing device of FIG. 6, illustrating two discrete depletableregions separated by a transition region therebetween;

FIG. 7 is a schematic illustration of a further embodiment of themultiplexing device of the previous figures, wherein the scanning regionis formed of a plurality of discrete regions;

FIG. 7A is a schematic illustration of a further embodiment of themultiplexing device of FIG. 7, showing alternative embodiments of thediscrete regions;

FIG. 8 is a schematic illustration of still another embodiment of thepresent invention, exemplifying a three-dimensional configurationcomprised of a plurality of stackable multiplexing devices;

FIG. 9 is a block diagram illustrating a serial connectivity of aplurality of multiplexing devices of the previous figures;

FIG. 10 is a perspective view of an exemplary multi-node cross-pointarray configuration using a plurality of multiplexing devices of theprevious figures, illustrating a two-dimensional architecture;

FIG. 11 is a schematic illustration of another exemplary multiplexingdevice of the present invention that is similar to the multiplexingdevice of FIG. 1, where the depletion region is controlled by a singleelectrode;

FIG. 12 is a schematic illustration of the multiplexing device of FIG.11, wherein the scannable conducting channel connects conducting lines,such as nano-scaled lines, on one side of the multiplexing device toelectrodes on the opposite side of the multiplexing device;

FIG. 13 is a schematic illustration of the multiplexing device of FIG.1, where the depletion region is controlled by applying a reverse biasto a p-n (or p+-n or n+-p junction);

FIG. 14 is a schematic illustration of another embodiment of themultiplexing device of FIG. 7A, showing alternative embodiments of theintermediate regions;

FIG. 15 is a schematic illustration of a semiconductor-on-insulator(e.g., SOI) MOSFET that shows the effects of a floating polysiliconregion in the multiplexing device of FIG. 14;

FIG. 16 is an isometric, schematic illustration of the multiplexingdevice of FIG. 14, rotated about its side; and

FIG. 17 is an isometric view of a multiplexing array formed of an arrayof multiplexing devices of FIG. 16.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

FIGS. 1 and 2 illustrate an exemplary multiplexing device 100 of thepresent invention. The multiplexing device 100 comprises a conductingchannel 110 that is controllably scannable within a scanning region 106.A first gate oxide layer 104 is disposed intermediate the scanningregion 106 and a first control gate 102, at one end of the multiplexingdevice 100. At the opposite end of the multiplexing device 100, a secondgate oxide layer 114 is disposed intermediate the scanning region 106and a second control gate 116.

When suitably biased by a potential V₁, the first control gate 102generates a first depletion region 108 in the scanning region 106.Similarly, when the second control gate 116 is suitably biased by apotential V₂, it generates a second depletion region 112 in the scanningregion 106. The first and second depletion regions 108, 112 interact togenerate the conducting channel 110.

The width w₁ of the first depletion region 108 is regulated by thepotential V₁ and the doping concentration in the scanning region 106.Similarly, the width w₂ of the second depletion region 112 is regulatedby the potential V₂ and the doping concentration in the scanning region106. As a result, the width and the position of the conducting channel110 can be very precisely controlled. FIGS. 1 and 2 illustrate theconducting channel 110 at two different positions along the scanningregion 106, and having different widths.

In a structure that is suitable for the formation of multiplexing device100, the first and second control gates 102 and 116, respectively, areformed of conductive layers. As used herein a conductive layer can beformed of any suitable conductive or semiconductive material. Forexample the conductive layer can be formed of copper, tungsten,aluminum, a silicided layer, a salicided layer, a semiconductive layer,or a conductive layer, such as metallic materials, polysilicon, silicongermanium, metallic composites, refractory metals, conductive compositematerials, epitaxial regions, amorphous silicon, titanium nitride, orlike conductive materials. Preferably, the conductive layers are formedof polysilicon layers that are doped with dopant atoms. Dopant atoms canbe, for example, arsenic and/or phosphorus atoms for n-type material, orboron atoms for p-type material.

Although the first and second control gates 102 and 116 can belithographically defined into two distinct sections that are oppositelydisposed relative to the scanning region 106, as illustrated in FIG. 1,it should be clear that the first and second control gates 102 and 116could be disposed at different positions relative to the scanning region106. In particular, while the multiplexing device 100 is illustrated ashaving a generally rectangular shape, it should be clear thatmultiplexing device 100 could assume various other shapes, such ascircular, oval, square, and various other shapes. Some of thesealternative designs for the multiplexing device 100 could require theallocation of the first and second control gates 102 and 116 at variouspositions that are not necessarily opposite.

The two distinct sections of the first and second control gates 102 and116 can be of a different conductivity type, for example: one sectioncan be n-type while the other section can be p-type dopants or the tworegions could have different metals. Known or available masking and ionimplanting techniques can be used to alter the doping of portions ofconductive layers.

The first and second control gates 102 and 116 can have the same ordifferent widths. The width of each control gate can, for example,exceed 1000 angstroms. The voltages V₁ and V₂ applied to the first andsecond control gates 102 and 116, respectively, can vary betweenapproximately 0 and +/−100 volts.

A dielectric first gate oxide layer 104 is formed intermediate the firstcontrol gate 102 and the scanning region 106. Similarly, a dielectricsecond gate oxide layer 114 is formed intermediate the second controlgate 116 and the scanning region 106. As used herein a dielectric layercan be any insulator such as wet or dry silicon dioxide (SiO₂), hafniumoxide, silicon nitride, tetraethylorthosilicate (TEOS) based oxides,borophospho-silicate-glass (BPSG), phospho-silicate-glass (PSG),boro-silicate-glass (BSG), oxide-nitride-oxide (ONO), oxynitridematerials, plasma enhanced silicon nitride (p-SiN_(x)), a spin on glass(SOG), titanium oxide, or like dielectric materials or compositedielectric films with a high k gate dielectric. A preferred dielectricmaterial is silicon dioxide.

The scanning region 106 can be formed of any suitable, depletablematerial. In this exemplary illustration, the scanning region 106 isformed of a depletion region, such as silicon or polysilicon layer thatis lightly doped with either an n-type dopant, or a p-type dopant. Inthis exemplary embodiment, the scanning region 106 is doped with ann-type dopant. The width of the scanning region 106 could exceed 5 nm.The various components of regions and layers of the multiplexing devicesdescribed herein, could be made using, for example, known or availablemethods, such as, for example, lithographic processes.

In operation, by varying the voltages V₁ and V₂ on the first and secondcontrol gates 102, 116, respectively, the conducting channel 110 iscontrollably scanned along the directions of the scanning arrows A andB, up and down the central column of the multiplexing device 100. In thepresent exemplary embodiment, the width, w (e.g., w1, w2) of thedepletion regions 108, 112 is determined by the following equation:w=(2)^(1/2)λ_(n)(v _(|))^(1/2)where λ_(n) is the extrinsic Debye length of the conducting channel 110;v_(|) is defined by (q*(V_(bi)+V)/kT) −2 where V_(bi) is the built-inpotential and V is the applied voltage. For an n-concentration of10**16/cc the maximum depletion width is on the order of 1 micron.

FIG. 2 is a schematic illustration of the multiplexing device of FIG. 1,showing the scannable conducting channel 110 with a relatively widerwidth, in a second position within the scanning region 106.

FIG. 3 illustrates another multiplexing device 200 according to analternative embodiment of the present invention, wherein the scannableconducting channel 110 connects conducting lines 201, such asnano-scaled lines 202 through 210 (e.g., having a width betweenapproximately 5 angstroms and 1,000 angstroms), on one side of themultiplexing device 200, to one or more electrodes 228 on the oppositeside of the multiplexing device 200. To this end, the multiplexingdevice 200 further includes a source 226, a first oxide layer 222, and asecond oxide layer 224.

In this exemplary embodiment, the first oxide layer 222 is in contactwith the first control gate 102 and the first gate oxide layer 104.Similarly, the second oxide layer 224 is in contact with the secondcontrol gate 116 and the second gate oxide layer 114. The source 226 isformed intermediate the first oxide layer 222 and the second oxide layer224, in contact with the scanning region 106, and the electrode 228.Layers 222 and 224 serve to isolate the gate regions 102 and 116 fromthe electrode (228) and source (226).

The source 226 can be formed of a silicon or polysilicon layer that isdoped with either an n-type dopant, or a p-type dopant. The source 226could be formed of any conductive or semiconductive material that formsan electrical contact to the scanning region 106 and electrode 228. Inthis exemplary embodiment, the source 226 is doped with an n+-typedopant. In operation, the conducting channel 110 is generated asexplained earlier in connection with FIGS. 1 and 2, and is scannedacross the scanning region 106 to establish contact with the desiredline, for example line 204, allowing the source 226 to inject electronsthrough the conducting channel 110, into the selected line 204.

In FIG. 3, the source 226 has an inner surface 236 that is illustratedas being generally flush with the oxide layers 222, 224. It shouldhowever be understood that the inner surface 236A of the source 226could alternatively be recessed relative to the oxide layers 222, 224,as shown in a dashed line. Alternatively, the inner surface 236B of thesource 226 could extend beyond the oxide layers 222, 224, as shown in adashed line.

FIG. 4 illustrates another multiplexing device 300 according to thepresent invention. Multiplexing device 300 is generally similar inconstruction to the multiplexing device 200 of FIG. 3, but is designedfor a different application. The scannable conducting channel 110 of themultiplexing device 300 connects conducting lines 201, such asnano-scaled lines 202-210, on one side of the multiplexing device 300,to other conducting lines 301, such as nano-scaled lines 302-310, on theopposite side of the multiplexing device 300.

In this exemplary embodiment, the lines 301 are coaxially aligned withthe lines 201, so that the conducting channel 110 interconnects twoaligned lines, such as lines 204 and 304.

FIG. 5 illustrates another multiplexing device 400 according to thepresent invention. Multiplexing device 400 is generally similar inconstruction to the multiplexing device 300 of FIG. 4, but is designedfor a different application. The scannable conducting channel 110connects conducting lines 401, such as nano-scaled lines 402-405, on oneside of the multiplexing device 400 to other conducting lines 411, suchas micro-scaled lines 412-415, on the opposite side of the device 400(e.g., having a width that exceeds approximately 100 angstroms).

FIG. 6 illustrates another multiplexing device 500 according to thepresent invention. Multiplexing device 500 is generally similar inconstruction to the multiplexing devices 100, 200, and 300 of FIGS. 1-3,but will be described, for simplicity of illustration, in connectionwith the design of multiplexing device 300 of FIG. 4. The scannableconducting channel 510 is curvilinearly (non-linearly) controlled, toconnect non-coaxially (or coplanarly) disposed lines 201, 301 on bothsides of the multiplexing device 500.

In order to effect this curvilinear conducting channel 510, themultiplexing device 500 is provided with four control gates 502, 503,504, 505 that are arranged in pairs, on opposite sides of the scanningregion 106. In this specific example, the control gates 502, 504 aredisposed, adjacent to each other, on one side of the scanning region106, and are separated by an insulation layer 512. Similarly, thecontrol gates 503, 505 are disposed, adjacent to each other, on theopposite side of the scanning region 106, and are separated by aninsulation layer 514.

Potentials can be applied independently to the control gates 502-505, togenerate a first depletion region 508 and a second depletion region 512,so that the conducting channel 510 is curvilinear. To this end, controlgates 502 and 503 are paired, so that when a potential V₁ is applied tothe control gate 502 and a potential V₂ is applied to the control gate503, a first portion 520 of the conducting channel 510 is formed.Similarly, when a potential V′₁ is applied to the control gate 504 and apotential V′₂ is applied to the control gate 505, a second portion 522of the conducting channel 510 is formed.

Portions 520 and 522 of the conducting channel 510 are not necessarilyco-linear, and are interconnected by an intermediate curvilinear section524. As a result, it is now possible to connect line 207 to line 305even though these two lines are not co-linearly disposed. Other lines onopposite (or different) sides of the multiplexing device 500 could beinterconnected by the conducting channel 510, by independently scanningthe first and second portions 520, 522 of the conducting channel 510,along the arrows (A, B) and (C, D), respectively.

While FIG. 6 illustrates only four control gates 502-505, it should beclear that more than four gates can alternatively be used.

FIG. 6A illustrates another multiplexing device 550 according to thepresent invention. Multiplexing device 550 is generally similar inconstruction to the multiplexing device 500 of FIG. 6. Similarly to FIG.6, the scannable conducting channel 510 is curvilinearly (non-linearly)controlled, to connect non-coaxially (or coplanarly) disposed lines 201,301 on both sides of the multiplexing device 550. However, the switchingdevice 550 comprises two discrete depletion regions 551, 552 that areseparated by an intermediate, electrically conducting transition region555.

In order to effect the curvilinear conducting channel 510, themultiplexing device 500 is provided with four control gates 562, 563,564, 565 that are arranged in pairs, on opposite sides of the scanningregions 551, 552, wherein each pair of control gates is separated fromthe other pair by the intermediate transition region 555. In thisspecific example, the control gates 562, 564 are disposed, adjacent toeach other, and are separated by the intermediate transition region 555,while the control gates 563, 565 are disposed, adjacent to each other,on the opposite side of switching device 550, and are separated by theintermediate transition region 555.

Potentials can be applied independently to the control gates 562-565, togenerate the first depletion region 551 and the second depletion region552, so that the conducting channel 510 is curvilinear. To this end,control gates 562 and 563 are paired, so that when a potential V1 isapplied to the control gate 562 and a potential V2 is applied to thecontrol gate 563, a first portion 520 of the conducting channel 510 isformed. Similarly, when a potential V′1 is applied to the control gate564 and a potential V′2 is applied to the control gate 565, a secondportion 522 of the conducting channel 510 is formed.

The switching device 550 further includes a plurality of gate oxidelayers 572, 573, 574, and 575 that separate the control gates 562, 563,564, and 565 from their respective depletion regions 551, 552.

While FIG. 6A illustrates four control gates 562-565 and one theintermediate transition region 555, it should be clear that more thanfour gates and one intermediate transition region 555 can besuccessively used to form the switching device 550.

FIG. 7 illustrates yet another multiplexing device 600 according to thepresent invention. Multiplexing device 600 is generally similar inconstruction to any of the previous multiplexing devices of FIGS. 1-6,but will be described, for simplicity of illustration, in connectionwith the design of multiplexing device 200 of FIG. 3. FIG. 7 illustratesthe feature that the scanning region 616 could be continuous or formedof a plurality of discrete sub-regions, such as sub-regions 606, 608,610 with boundaries 607, 609 therebetween.

FIG. 7A illustrates a further multiplexing device 650 according to thepresent invention. Multiplexing device 650 is generally similar inconstruction to multiplexing device 600 of FIG. 7. The scanning region656 of multiplexing device 600 is formed of a plurality of discretesub-regions, such as sub-regions 676, 677, 678, with intermediateregions 680, 681, 682 therebetween. The intermediate regions 680, 681,682 serve the function of extending the depletion regions 676, 677, 678and further isolating the conducting channels from each other.

While only three intermediate regions 680, 681, 682 are illustrated, itshould be clear that one or more intermediate regions may be formed. Inthis particular embodiment, the intermediate regions 680, 681, 682 aregenerally similar in design and construction, and are dispersed alongthe scanning region 656. In another embodiment, the intermediate regions681, 682 are disposed contiguously to each other. The spacing betweenthe intermediate regions 680, 681, 682 and the widths of all the regionsin the embodiments described herein, could be changed to suit theparticular applications for which the multiplexing devices are designed.

Considering now an exemplary intermediate region 681, it is formed oftwo semiconductor layers 690, 691 with an intermediate layer 692 havinga high dielectric constant material that is sandwiched between thesemiconductor layers 690, 691. According to another embodiment, theintermediate layer 692 is made of a semiconducting material that isdifferent from that of layers 690 and 691 to form a quantum wellstructure.

Intermediate region 682 includes an intermediate region 699 that isgenerally similar to the intermediate region 692. Alternatively, theintermediate regions 692, 699 could have different work functions thanthe work function of semiconductor layer 691 so as to produce a quantumwell function.

FIG. 8 illustrates another multiplexing device 700 of the presentinvention, exemplifying a three-dimensional configuration. Multiplexingdevice 700 is comprised of a plurality of stackable multiplexingdevices, such as multiplexing devices 100, 200, 300, 400, 500, 600, thatcan be different or similar. Each of these stackable multiplexingdevices can be independently controlled as described in connection withFIGS. 1-7.

According to this embodiment, one, or a group of multiplexing devices100, 200, 300, 400, 500, 600 can be selected by applying suitabledepletion potentials V₃, V₄, to two outer electrodes 703, 704,respectively. Once the multiplexing device or a group of multiplexingdevices 100, 200, 300, 400, 500, 600 is selected, the selectedmultiplexing device or a group of multiplexing devices 100, 200, 300,400, 500, 600 is operated individually, as described earlier. Inaddition, a high-K insulation layer (e.g., 711, 712, 713, 714, 715) isinterposed between two contiguous multiplexing devices (e.g., 100, 200,300, 400, 500, 600).

FIG. 9 illustrates another multiplexing device 800 of the presentinvention, exemplifying the serial connectivity of a plurality ofmultiplexing devices, such as multiplexing devices 200, 300, 400. Eachof these serially connected multiplexing devices 200, 300, 400 can beindependently controlled, and the output of one multiplexing device usedto control the accessibility of the subsequent multiplexing device.

FIG. 10 is a perspective view of an exemplary multi-node cross-pointarray 900 using at least two multiplexing device, e.g., 200, 300 whoserespective outputs are selected as described above, onto output lines201, 301, are selected as described above. The selected outputs areprocessed (collectively referred to as “processed outputs”), as desired,by for example, operational devices 950. The processed outputs can beused directly, or, as illustrated in FIG. 10, they can be further fed toone or more multiplexing devices, e.g., 400, 700, resulting in outputsthat are fed to respective output lines 400, 700.

The operational devices 950 could be, for example, memory cells, logicdevices, current-driven or voltage-driven elements, such as lightemitters, heat emitters, acoustic emitters, or any other device thatrequires addressing or selective accessibility.

As an example, the operational device 950 can include a switchableelement that is responsive to current change or voltage change, or phasechange, resulting in change of resistance or magneto-resistance, thermalconductivity or change in electrical polarization. Alternatively, theoperational devices can include a carbon nano tube, a cantilever, aresonance driven device, or a chemical or biological sensor.

FIG. 11 is a schematic illustration of another exemplary multiplexingdevice 1100 according to the present invention. The multiplexing device1100 is generally similar in design and operation to the multiplexingdevice 100 of FIG. 1, and comprises a conducting region 1112 that iscontrollably scannable within a scanning region 106. The gate oxidelayer 104 is disposed intermediate the scanning region 106 and thecontrol gate 102, at one end of the multiplexing device 1100. At theopposite end of the multiplexing device 1100, an insulator layer, suchas an oxide layer 1114, is disposed contiguously to the scanning region106. It should be clear that the insulator layer 1114 is optional.

The depletion region 1108 is controlled by applying a potential V1 tothe control gate 102, in order to generate the conducting region 1112.An important feature of the multiplexing device 1100 is to control thewidth w of the depletion region 1108 using a single control gate 102.Unlike the multiplexing device 100, the undepleted region 1112 of themultiplexing device 1100 is not necessarily a small region. It could, insome cases, encompass the entire scanning region 106 under the controlgate 102 and the gate oxide 104. As further illustrated in FIG. 12, themultiplexing device 1100 enables concurrent multibit sequentialprogramming.

FIG. 12 is a schematic illustration of the multiplexing device 1100 ofFIG. 11, wherein the scannable conducting channel 110 connectsconducting lines, such as nano-scaled lines 201, on one side of themultiplexing device 1100 to electrodes (or to a micro line) on theopposite side of the multiplexing device 1100. Since the multiplexingdevice 1100 comprises a single control gate (or electrode) 102, manynano-scaled lines 201 could be selected for any value of the controlgate potential V₁. This requires a serial access scheme as compared to arandom access scheme used by the embodiments of FIGS. 1-8.

FIG. 13 is a schematic illustration of a multiplexing device 1300 thatis similar to the multiplexing device 100 of FIG. 1, but without the twogate oxide layers 104, 114. In the previous embodiments, the depletionregions 108, 112 were comprised, for example of a depletion region of aMetal Oxide Semiconductor (MOS) system. However, the depletion regions108, 112 of the multiplexing device 1300 of FIG. 13 form two p+-njunctions (or alternatively one p+-n junction) with the adjacent controlgates 102, 116, respectively. In an alternative embodiment, thedepletion regions 108, 112 form two n+-p junctions (or alternatively onen+-p junction) with the adjacent control gates 102, 116, respectively.

By applying potentials V₁ and V₂ to the p+ regions (control gates 102and 116), a conduction channel 110 could be formed in around the middleof the scanning region 106. One of the advantages of this multiplexingdevice 1300 is that the breakdown voltages of p-n junctions can behigher than the gate oxide breakdown voltages. This means that highervoltages could be applied to the control gate 102, 116. This could alsomean that the scanning region 106 could be bigger. In an alternativeembodiment, the multiplexing device 1300 could be formed of a singlecontrol gate, such as control gate 102.

In yet another embodiment, the depletion regions 108, 112 of themultiplexing device 1300 are formed by Schottky barriers(Metal—semiconductor regions), wherein the first and second controlgates 102 and 116 are formed of a metal material. The depletion width inthe Schottky barrier is controlled much the same way as the depletionwidth in a p-n junction.

Similarly to the illustration of FIG. 3, it is possible to selectnano-scaled lines 201 by applying appropriate potentials V1 and V2 tothe first and second control gates 102, 116, respectively, and connectit to the micro-scaled line or source 226. Alternatively Schottkybarriers (metal-n or metal-p) regions may be used to do the connectionas well.

FIG. 14 is a schematic illustration of another multiplexing device 1400according to the present invention. The multiplexing device 1400 isgenerally similar in function and operation to the multiplexing device650 of FIG. 7A, and shows an alternative embodiment of the intermediateregions 1480, 1481, in order to illustrate an exemplary instance ofnano-pillar addressing.

In this embodiment, the semiconducting depletion regions 676, 677, 678are physically separated through a combination of dielectrics (e.g.,oxide/nitride/high-K) and electrode/semiconducting regions that arereferred to as intermediate regions 1480, 1481. This allows a reductionin the leakage between the bits and extends the range of the maximumdepletion region possible. This may also allow low voltage operation.Though only three semiconducting depletion regions 676, 677, 678 and twointermediate regions 1480, 1481 are shown for illustration purpose only,it should be clear that a different number of regions couldalternatively be used.

Each semiconductor depletion region 676, 677, 678 is bounded by at leastone thin dielectric layer, e.g., 690, 691, which is preferably but notnecessarily composed of an oxide in order to passivate the sidewalls andto guarantee good electrical properties. Sandwiched between layers 690and 691 in each intermediate region 1480, 1481 is a high-K dielectricmaterial 1491, 1492, respectively. This minimizes the voltage dropbetween the intermediate regions 1480, 1481 while maintaining isolation.The high-K dielectric material 1492 could be any dielectric with areasonable dielectric constant, wherein a higher dielectric constantprovides better electrical properties.

Each of the intermediate regions 1480, 1481 further comprises two sideinsulation regions on opposite ends of the high-K dielectric material1491, 1492. More specifically, intermediate region 1480 furthercomprises two side insulation regions 693, 695, and intermediate region1481 further comprises two side insulation regions 694, 696. Sideinsulation regions 693-696 isolate the high-K dielectric material 1491,1492 from the semiconducting depletion regions 676, 677, 678.

Alternatively, each of the dielectric layers 690, 691 comprises a thindielectric material, typically oxide, that bounds the semiconductingdepletion regions 676, 677, 678. However, the intermediate regions 1480,1481 between the dielectric layers 690, 691 are filled with asemiconducting material or a metal material to form regions 1491, 1492.Each of the regions 1491, 1492 is preferably floating and its potentialdepends on the capacitive coupling of the different control electrodes102, 114 to these regions 1491, 1492.

This design is desirable for the following reasons. A heavily dopedsemiconductor or metallic region further minimizes the applied voltagerequirements. In addition, the work function difference between theelectrode/semiconductor region 1492 and the semiconductor region resultsin an inversion layer (thin layer of electrons) at the interface of thesemiconducting depletion regions 676, 677, 678. This allows themultiplexing device 1400 to work via the depletion of the inversionlayer charge as opposed to a charge resulting from ionized dopant atoms,and therefore minimizes dopant fluctuation effects. In this case,insulation regions 693-696 are required to prevent shorting of theelectrodes (i.e., 1491, 1492) to the various semiconducting depletionregions 676, 677, 678 and to keep it electrically isolated. This effectis further illustrated in FIG. 15 using the example of a simple MOSdevice 1500.

As further illustrated in FIG. 7A, the multiplexing device 1400 of FIG.14, wherein the scannable conducting channel 110 could be connected toconducting lines, such as nano-scaled lines 201, on one side of themultiplexing device 1400 to electrodes (or micro lines) on the oppositeside of the multiplexing device 1400.

FIG. 15 illustrates the effect of including floatingpolysilicon/electrode regions (1491 and 1492 in FIG. 14 or 1525 in FIG.15) in semiconducting structure 1500. Structure 1500 is generally formedof a silicon on insulator (SOI) wafer with a thin (e.g., less thanapproximately 100 nm) silicon region on top of an insulator (oxide). TheMOS device includes an n-channel device with n+ source regions 1505 anddrain regions 1510. The gate 1525 is formed of n+ polysilicon material.At zero bias gate, the potentials of the source 1505 and drain 1510develop an inversion layer 1507 in the channel of semiconductor region1515. This inversion layer 1507 is generated because of the workfunction difference between the gate 1525 and the silicon/semiconductor1515. This work function difference causes the bands in the silicon 1515at zero gate voltage to bend in much the same way as a transistor withpositive applied bias. This inversion charge in the addressing schememay be depleted in much the same way as dopant charge. One way to thinkabout the transistor in FIG. 15 is that it emulates a negative thresholdvoltage transistor.

Referring now to FIG. 16, it illustrates a multiplexing device 1600according to the present invention. Multiplexing device 1600 isgenerally similar to multiplexing device 1400 of FIG. 14, but is rotatedabout its side. Multiplexing device 1600 comprises a plurality ofnano-pillars 1676, 1677, 1678, 1679 that are interposed between thefirst control gate 102, the second control gate 116, and intermediateregions 1610, 1615, 1620. The intermediate regions 1610, 1615, 1620 aregenerally similar in construction and operation to the intermediateregions 1480, 1481 of FIG. 14. While four nano-pillars 1676, 1677, 1678,1679 are illustrated, it should be clear that a different number ofnano-pillars can be selected. A plurality of oxide/dielectric layers1686, 1687, 1688 surround the intermediate regions 1610, 1615, 1620 toisolate them from the nano-pillars 1676, 1677, 1678, 1679, and theoperational devices 1635, 1645.

Arrows C indicate the direction of the electrical currents flowingthrough one or more nano-pillars 1676, 1677, 1678, 1679 selected bydepletion, as described earlier. While the direction of the current isshown in the current direction, it should be clear that the currentcould alternatively flow in the opposite direction. The current flowsbetween the two electrodes 1602, 1604, through operational devices 1635,1645 (denoted earlier as operational devices 950).

FIG. 17 shows a multiplexing array 1700 that is formed of an array ofmultiplexing devices 1600 of FIG. 16, with the electrodes 1602, 1604,the operational devices 1635, 1645, and the control gates 102, 116removed for clarity of illustration. The plurality of multiplexingdevices 1600 are separated and insulated by a plurality of insulationlayers 1705. The insulation layers 1705 are preferably, but notnecessarily formed of oxide layers, and could alternatively be made ofthe same material as the intermediate region 1610. While only fourmultiplexing devices 1600 are illustrated, it should be clear that adifferent number of multiplexing devices 1600 can alternatively be used.

It is to be understood that the specific embodiments of the presentinvention that have been described are merely illustrative of certainapplications of the principle of the multiplexing device. Numerousmodifications may be made to the multiplexing device without departingfrom the spirit and scope of the present invention.

1. A method comprising: forming a doped semiconducting region; applyinga voltage with at least one control gate across a scanning region forpositioning a depletion region of the semiconducting region within thesemiconducting region, in order to access a conducting channel that isdefined by the depletion region through the scanning region, wherein theconducting channel selectively connect at least a first conducting linecoupled to the scanning region to at least a second conducting linecoupled to the scanning region, wherein at least one of the firstconducting line and the second conducting line comprises a nano-scaledline having a width between approximately 5 angstroms and 1,000angstroms, wherein at least one of the first conducting line and thesecond conducting line comprises a micro-scaled line having a width thatexceeds approximately 1,000 angstroms, and wherein a location of theconducting channel is movable across the scanning region; andsubstantially and selectively depleting a selected region of a dopedsemiconducting scanning in order to limit a passage of electrons throughthe scanning region, to the conducting channel.